New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of low viscosity fluids

• Low viscosity photochemical dispense with 1 - 100 cP or at higher viscosities when dispense pressure does not exceed 29 psig

• Reliable dispense of low-viscosity fluid (1-100 cP) without sacrificing filtration performance

• New user-friendly MMI software simplifies recipe programming and provides real-time status

• Real time robust confirmation tools help minimize costly wafer defects